Glossary entry (derived from question below)
German term or phrase:
grobe Fertigungsrückstände
English translation:
rough process residues/process residue deposits
Added to glossary by
shirkya2002
Aug 25, 2009 12:36
14 yrs ago
German term
grobe Fertigungsrückstände
German to English
Science
Physics
Plasma nitriding - sputtering
Das Sputtern ersetzt jedoch nicht die Reinigung der Bauteile von groben Fertigungsrückständen.
Proposed translations
(English)
3 +1 | rough process residues/process residue deposits | Kim Metzger |
Proposed translations
+1
17 mins
Selected
rough process residues/process residue deposits
I think, but I'm not sure.
A method of cleaning process residues from the surface of a substrate processing chamber component having holes. In the method, the component is at least partially immersed into a cleaning solution having hydrafluoric acid and nitric acid, and a non-reactive gas is passed through the holes to prevent the cleaning solution from back-flowing into the holes during the cleaning process. The method is particularly useful for cleaning sputtering residue deposits from an electrostatic chuck used in a sputtering process.
http://www.freepatentsonline.com/6821350.html
A method of cleaning process residues from the surface of a substrate processing chamber component having holes. In the method, the component is at least partially immersed into a cleaning solution having hydrafluoric acid and nitric acid, and a non-reactive gas is passed through the holes to prevent the cleaning solution from back-flowing into the holes during the cleaning process. The method is particularly useful for cleaning sputtering residue deposits from an electrostatic chuck used in a sputtering process.
http://www.freepatentsonline.com/6821350.html
4 KudoZ points awarded for this answer.
Comment: "thx"
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